NTHU Discovers Optical Filamentation Mechanism, Attosecond Pulses Aid Semiconductor Material Inspection
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A research team from National Tsing Hua University's Department of Electrical Engineering has successfully utilized the 'optical filamentation' mechanism to generate high-quality isolated attosecond pulses for semiconductor material inspection. This technology naturally compresses laser light, acting like an ultrafast strobe light to capture electron movements, enabling material inspection in advanced semiconductor manufacturing processes.