What can be observed with the 'Differential Interference Unit'?

It utilizes phase differences to visualize minute steps and scratches on semiconductor wafers and other surfaces.

What is the strength of the 'Pupil Division Polarization Unit'?

By capturing changes in polarization, it can inspect warpage and inclinations over a wide field of view in a short time without vertical movement required by white-light interferometric microscopes.

How does it differ from existing inspection equipment?

It can observe a wider field of view in a single capture compared to conventional dedicated equipment, allowing for significant time savings and cost reduction.

AI News NQ Analysis

Expansion of Inspection Solutions for Nanometer-Scale Micro-Defects

NQ Score 92/100

N1 Content Completeness 10

AI Summary (NQ-processed)

CCS Inc. has launched the 'Differential Interference Unit' and 'Pupil Division Polarization Unit,' optical units that inspect micro-defects on semiconductor wafers and other materials with high speed and high resolution. These units reduce inspection time by approximately 1/8 compared to conventional dedicated equipment.

AI Analysis

Frequently Asked Questions

Q: What can be observed with the 'Differential Interference Unit'?: A: It utilizes phase differences to visualize minute steps and scratches on semiconductor wafers and other surfaces.
Q: What is the strength of the 'Pupil Division Polarization Unit'?: A: By capturing changes in polarization, it can inspect warpage and inclinations over a wide field of view in a short time without vertical movement required by white-light interferometric microscopes.
Q: How does it differ from existing inspection equipment?: A: It can observe a wider field of view in a single capture compared to conventional dedicated equipment, allowing for significant time savings and cost reduction.