TOMOEGAWA's Breathable Heater "iCas MCT" Adopted in Nikon's Semiconductor Lithography Systems, Contributing to Precise Temperature Control
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TOMOEGAWA CORPORATION has announced that its newly developed breathable heater component, "iCas MCT," has been adopted by Nikon Corporation for its semiconductor lithography systems. Utilizing a stainless steel fiber sheet, the product achieves high thermal responsiveness by heating while allowing air to pass through it. This contributes to the precise temperature control, increased productivity, and improved energy efficiency of the lithography equipment. Nikon's system featuring the component is scheduled for sale from December 2026.
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